真空閥門具備以下基本特點(diǎn)：首先，具有較高的氣密封性，密封可靠。其次，對(duì)氣流的阻力盡可能小，即閥門的流導(dǎo)要盡可能大。再者，密封部件耐磨性良好，能夠反復(fù)使用，壽命較長(zhǎng)。同時(shí)，閥體材料及密封件的放氣量要小。此外，操作應(yīng)靈活，便于清洗安裝，性能可靠且維修方便。對(duì)于超高真空閥門而言，還要求能夠耐高溫烘烤，溫度可達(dá) 450℃。而對(duì)節(jié)流閥來說，則要求能夠均勻調(diào)節(jié)氣體流量。

　　Vacuum valves have the following basic characteristics: firstly, they have high air tightness and reliable sealing. Secondly, the resistance to airflow should be minimized as much as possible, that is, the flow guidance of the valve should be maximized. Furthermore, the sealing components have good wear resistance, can be reused repeatedly, and have a long service life. At the same time, the air release of the valve body material and sealing components should be small. In addition, the operation should be flexible, easy to clean and install, reliable in performance, and easy to maintain. For ultra-high vacuum valves, it is also required to be able to withstand high temperature baking, with a temperature of up to 450 ℃. For throttle valves, it is required to be able to uniformly regulate the gas flow rate.

　　常用真空閥門閥體的材料主要有金屬和玻璃。手動(dòng)真空閥門驅(qū)動(dòng)手輪采用高強(qiáng)度塑料材料，玻璃真空活塞又稱“考克”，一般用于玻璃真空系統(tǒng)、小型真空裝置、真空計(jì)規(guī)管或校準(zhǔn)系統(tǒng)上。優(yōu)點(diǎn)是制作比較容易、使用方便，易于清洗觀察，化學(xué)穩(wěn)定和絕緣性好，放氣量較小等。　　不足之處是由于玻璃的脆性及活塞彎口處涂一層油脂，故限制了它的使用范圍。工業(yè)生產(chǎn)所需要的真空裝置，如真空鍍膜設(shè)備、真空冶煉設(shè)備、真空熱處理設(shè)備、空間環(huán)境模擬設(shè)備、火箭發(fā)動(dòng)機(jī)模擬設(shè)備、衛(wèi)星表面帶電模擬設(shè)備、粒子加速器及受控核聚變裝置、重離子加速器等都采用金屬閥門。常用的真空閥門根據(jù)結(jié)構(gòu)特點(diǎn)有：擋板閥、翻板閥、蝶閥、球閥、連桿閥、隔板閥、閘閥、雙通閥、三通閥、四通直通閥和直通閥等幾大類。其中，真空擋板閥和插板閥在真空系統(tǒng)中有著廣泛的應(yīng)用。01真空擋板閥01

　　The commonly used materials for vacuum valve bodies are mainly metal and glass. The manual vacuum valve drive handwheel is made of high-strength plastic material, and the glass vacuum piston, also known as "cock", is generally used in glass vacuum systems, small vacuum devices, vacuum gauge gauges or calibration systems. The advantages are that it is relatively easy to make, convenient to use, easy to clean and observe, chemically stable and insulated, and has a small amount of air release. The shortcomings are due to the brittleness of the glass and the application of a layer of grease at the piston bend, which limits its range of use. The vacuum devices required for industrial production, such as vacuum coating equipment, vacuum smelting equipment, vacuum heat treatment equipment, space environment simulation equipment, rocket engine simulation equipment, satellite surface electrification simulation equipment, particle accelerators and controlled nuclear fusion devices, heavy ion accelerators, etc., all use metal valves. The commonly used vacuum valves are divided into several categories based on their structural characteristics, including baffle valves, flap valves, butterfly valves, ball valves, connecting rod valves, diaphragm valves, gate valves, two-way valves, three-way valves, four-way through valves, and through valves. Among them, vacuum baffle valves and plug valves have a wide range of applications in vacuum systems. 01 Vacuum barrier valve 01

　　結(jié)構(gòu)與工作原理

　　Structure and Working Principle

　　真空擋板閥的工作原理是閥板通過閥桿做上下運(yùn)動(dòng)而實(shí)現(xiàn)密封的。驅(qū)使閥桿運(yùn)動(dòng)的傳動(dòng)部件有手動(dòng)、手電兩動(dòng)、氣動(dòng)三種方式。手動(dòng)傳動(dòng)部件，以螺紋結(jié)構(gòu)為主，也可以采用平凸輪結(jié)構(gòu)。 ?當(dāng)接通電源后，電動(dòng)機(jī)按某一方向(如開啟方向)旋轉(zhuǎn)，通過蝸輪、蝸桿帶動(dòng)閥桿向上運(yùn)動(dòng)使閥板上升，當(dāng)閥上升到一定高度時(shí)，行程開關(guān)自動(dòng)切斷電源，閥桿運(yùn)動(dòng)立即停止，反之亦然。手動(dòng)時(shí)，松開手輪背帽，用手按一定方向轉(zhuǎn)動(dòng)手輪即可， ?氣動(dòng)傳動(dòng)部件以壓縮干燥空氣為動(dòng)力，通過電磁換向閥改變氣路方向，推動(dòng)汽缸活塞上下運(yùn)動(dòng)，帶動(dòng)閥桿上下運(yùn)動(dòng)，使閥板開啟關(guān)閉，從而達(dá)到接通或停止氣流的目的。 ? ?圖1 直角式真空擋板閥結(jié)構(gòu)

　　The working principle of a vacuum damper valve is that the valve plate achieves sealing by moving up and down through the valve stem. There are three types of transmission components that drive the movement of the valve stem: manual, manual electric dual action, and pneumatic. Manual transmission components mainly use threaded structures, but can also adopt flat cam structures. When the power is turned on, the motor rotates in a certain direction (such as the opening direction), and the worm gear and worm drive the valve stem to move upward, causing the valve plate to rise. When the valve rises to a certain height, the travel switch automatically cuts off the power, and the valve stem movement immediately stops, and vice versa. When manual, release the back cap of the handwheel and rotate it in a certain direction with your hand. The pneumatic transmission component is powered by compressed dry air and changes the direction of the air path through an electromagnetic directional valve, pushing the cylinder piston up and down and driving the valve stem up and down to open and close the valve plate, thereby achieving the purpose of connecting or stopping the air flow. Figure 1 Structure of Right Angle Vacuum Baffle Valve

　　1—導(dǎo)向槽 ? 2—導(dǎo)向銷 ? 3—閥桿 ? 4—閥蓋5—密封閥 ? 6—閥體

　　1- Guide groove 2- Guide pin 3- Valve stem 4- Valve cover 5- Sealing valve 6- Valve body

　　真空擋板閥有高真空擋板閥和超高真空擋板閥兩種。1.高真空擋板閥用于高真空系統(tǒng)接通或截止氣流。適用壓力范圍：軸封為橡膠時(shí)為1.3×10-4～105Pa；軸封為波紋管結(jié)構(gòu)時(shí)為1.3×10-5～105Pa。工作介質(zhì)溫度：-25～80℃（密封件為丁腈橡膠）；-30～150℃(密封件為氟橡膠)。

　　There are two types of vacuum baffle valves: high vacuum baffle valves and ultra-high vacuum baffle valves. 1. High vacuum baffle valves are used to connect or cut off airflow in high vacuum systems. Applicable pressure range: 1.3 × 10-4~105Pa when the shaft seal is rubber; 1.3 × 10-5~105Pa when the shaft seal is corrugated tube structure. Working medium temperature: -25~80 ℃ (seal made of nitrile rubber); -30-150 ℃ (seal made of fluororubber).

　　2.板閥用于超高真空系統(tǒng)接通或截止氣流。適用壓力范圍為1.3×10-3～105Pa。閥門開啟狀態(tài)，烘烤溫度小于400℃；閥體材料為不銹鋼；閥板材料為無氧銅；軸封處密封件材料為不銹鋼波紋管。這兩種真空擋板閥使用的工作介質(zhì)為潔凈的空氣或?qū)﹂y門無腐蝕的干凈氣體。不適合用在對(duì)金屬有強(qiáng)腐蝕性和含有顆粒狀態(tài)灰塵的氣體情況下長(zhǎng)期使用。02真空插板閥01

　　2. Plate valves are used to connect or cut off airflow in ultra-high vacuum systems. The applicable pressure range is 1.3 × 10-3-105Pa. The valve is in the open state and the baking temperature is less than 400 ℃; The valve body material is stainless steel; The valve plate material is oxygen free copper; The sealing material at the shaft seal is stainless steel corrugated pipe. The working medium used for these two types of vacuum baffle valves is clean air or clean gas that is non corrosive to the valve. Not suitable for long-term use in gases that are highly corrosive to metals and contain particulate dust. 02 Vacuum plug valve 01

　　工作原理及使用范圍

　　Working principle and scope of use

　　真空插板閥的工作原理是閥通過閥桿的左右或上下運(yùn)動(dòng)，將閥板與閥座壓緊實(shí)現(xiàn)密封。驅(qū)動(dòng)閥桿運(yùn)動(dòng)的方式有手動(dòng)、電動(dòng)、氣動(dòng)三種。手動(dòng)是通過手輪的旋轉(zhuǎn)，帶動(dòng)閥桿和閥桿上的螺母或四桿連動(dòng)式的閥桿使閥板運(yùn)動(dòng)。 ?手、電兩用的傳動(dòng)部件由直流電動(dòng)機(jī)、齒輪箱組成。電動(dòng)操作時(shí)，電動(dòng)機(jī)按某一方向（如關(guān)閉方向）旋轉(zhuǎn)，并通過傳動(dòng)部件使四桿連動(dòng)式的閥桿往復(fù)運(yùn)動(dòng)。當(dāng)閥板進(jìn)入與閥座密封部位時(shí)，閥板靠板式彈簧部件的作用，使閥板壓緊。 ?此時(shí)裝有行程開關(guān)而自動(dòng)切斷電源，運(yùn)動(dòng)立即停止。反之，若需打開閥門時(shí)，只需按反轉(zhuǎn)電鈕即可。手動(dòng)時(shí)，只需松開手輪背帽，按一定方向用手轉(zhuǎn)動(dòng)手輪即可。 ?圖1為CCD-A型手、電兩用的超高真空插板閥外形圖。該閥結(jié)構(gòu)合理，閥板與閥體密封時(shí)漏氣速率小于1×10-7Pa·L/s；閥門總漏氣速率小于5×10-8Pa·L/s；閥板開啟時(shí)閥體烘烤溫度小于150℃；手動(dòng)裝置允許受熱溫度小于65℃；工作穩(wěn)定可靠，操作方便；可遠(yuǎn)距離控制。氣動(dòng)驅(qū)動(dòng)部件以壓縮干燥空氣為動(dòng)力，通過電磁換向閥使氣動(dòng)部件帶動(dòng)傳動(dòng)裝置，使閥門往復(fù)運(yùn)動(dòng)實(shí)現(xiàn)啟閉作用，達(dá)到密封的目的。 ? 圖1 CCD-A型手、電兩用超高真空插板閥外形圖真空插板閥有高真空插板閥和超高真空插板閥兩種。

　　The working principle of vacuum plug valve is that the valve is sealed by compressing the valve plate and valve seat through the left and right or up and down movement of the valve stem. There are three ways to drive the valve stem movement: manual, electric, and pneumatic. Manual operation is achieved by rotating the handwheel to drive the valve stem and the nut or four-bar linkage valve stem to move the valve plate. The transmission components that can be used for both manual and electrical purposes consist of a DC motor and a gearbox. When operated electrically, the motor rotates in a certain direction (such as the closing direction) and causes the four-bar linkage valve stem to reciprocate through transmission components. When the valve plate enters the sealing part with the valve seat, the valve plate is compressed by the action of the plate spring component. At this time, a travel switch is installed to automatically cut off the power supply, and the movement immediately stops. On the contrary, to open the valve, simply press the reverse button. When operating manually, simply loosen the back cap of the handwheel and turn it in a certain direction with your hand. Figure 1 shows the appearance of the CCD-A type ultra-high vacuum plug valve, which can be used for both manual and electrical purposes. The valve structure is reasonable, and the leakage rate when the valve plate and valve body are sealed is less than 1 × 10-7Pa · L/s; The total leakage rate of the valve is less than 5 × 10-8Pa · L/s; When the valve plate is opened, the baking temperature of the valve body is less than 150 ℃; The manual device allows the heating temperature to be less than 65 ℃; Stable and reliable work, easy to operate; Can be remotely controlled. The pneumatic drive component is powered by compressed dry air and drives the transmission device through an electromagnetic directional valve, causing the valve to reciprocate and achieve the purpose of sealing. Figure 1: Outline drawing of CCD-A type manual and electric dual-purpose ultra-high vacuum plug valve. There are two types of vacuum plug valves: high vacuum plug valve and ultra-high vacuum plug valve.  ?

　　1、高真空插板閥主要用于高真空系統(tǒng)中接通或截止氣流?？砂惭b在被抽真空容器（真空室）與真空泵之間；或用于在半連續(xù)真空作業(yè)的進(jìn)出料容器上。使用溫度為-20～80℃，不適用于對(duì)黑色金屬有腐蝕性或含顆粒狀物灰塵的氣體。

　　1. High vacuum plug valves are mainly used to connect or cut off airflow in high vacuum systems. Can be installed between the evacuated container (vacuum chamber) and the vacuum pump; Or used on inlet and outlet containers for semi continuous vacuum operations. The operating temperature is -20~80 ℃, and it is not suitable for gases that are corrosive to black metals or contain particulate dust.

　　2、超高真空插板閥主要用于超高真空系統(tǒng)中接通或截止氣流。適用的介質(zhì)為潔凈的空氣或非腐蝕性氣體；適用溫度在閥門開啟時(shí)，閥體允許烘烤溫度小于150℃。 ?由于真空插板閥具有流導(dǎo)大，密封性能好，放氣率低，體積小，結(jié)構(gòu)緊湊、合理，操作方便，安裝位置可任意選擇等一系列優(yōu)點(diǎn)，因此真空插板閥廣泛用于中、大型高真空、超高真空裝置的真空系統(tǒng)中。

　　2. Ultra high vacuum plug valves are mainly used to connect or cut off airflow in ultra-high vacuum systems. The applicable medium is clean air or non corrosive gas; When the valve is opened, the valve body is allowed to bake at a temperature less than 150 ℃. Due to its large flow conductivity, good sealing performance, low air release rate, small size, compact and reasonable structure, easy operation, and optional installation position, vacuum plug valves are widely used in vacuum systems of medium and large high vacuum and ultra-high vacuum devices.

　　02形式和性能參數(shù)

　　02 Form and Performance Parameters

　　1、高真空插板閥的形式與基本參數(shù)，已有行業(yè)標(biāo)準(zhǔn)（JB/T 4077—91）。該標(biāo)準(zhǔn)規(guī)范的高真空插板閥的形式和基本參數(shù)，適用于1.3×10-5～1.0×105Pa真空系統(tǒng)中用來開啟或隔斷氣流的插板閥。開啟閥門時(shí)，閥板兩側(cè)的壓差應(yīng)小于或等于2.7kPa。

　　1. The form and basic parameters of high vacuum plug valve have been standardized in the industry (JB/T 4077-91). The form and basic parameters of the high vacuum plug valve specified in this standard are applicable to plug valves used to open or block airflow in vacuum systems ranging from 1.3 × 10-5 to 1.0 × 105Pa. When opening the valve, the pressure difference on both sides of the valve plate should be less than or equal to 2.7kPa.

　　2、我國(guó)生產(chǎn)的超高真空插板閥有手動(dòng)（CC型）、氣動(dòng)（CCQ型）和電動(dòng)（CCD型）三種。適用于介質(zhì)為清潔空氣及非腐蝕性氣體的超高真空系統(tǒng)中切斷或接通氣流。其中GC型系列高真空插板閥是以螺桿傳動(dòng)來推動(dòng)鋼球運(yùn)動(dòng)，撐開閥板關(guān)閉，又靠彈簧力收攏閥板打開的高真空閥門；GCQ系列以壓縮空氣為動(dòng)力推動(dòng)鋼球運(yùn)動(dòng)，實(shí)現(xiàn)閥門的開啟和關(guān)閉。這兩種閥的材料為不銹鋼，漏氣速率不超過1.3×10-7Pa·L/s。GCD型系列閥門形式同CCD型超高真空插板閥，只是連接法蘭按高真空法蘭由刀口金屬密封結(jié)構(gòu)改為丁腈橡膠圈密封結(jié)構(gòu)；閥體閥板材料可為不銹鋼或碳鋼鍍鎳，閥板密封件材料為丁腈橡膠。適用范圍為1.3×104～105Pa。

　　2. There are three types of ultra-high vacuum plug valves produced in China: manual (CC type), pneumatic (CCQ type), and electric (CCD type). Suitable for cutting off or connecting airflow in ultra-high vacuum systems with clean air and non corrosive gases as the medium. The GC series high vacuum plug valve is a high vacuum valve that uses screw transmission to push the steel ball to move, opens and closes the valve plate, and then uses spring force to retract the valve plate and open it; The GCQ series is powered by compressed air to propel steel balls and achieve valve opening and closing. The material of these two valves is stainless steel, and the leakage rate does not exceed 1.3 × 10-7Pa · L/s. The GCD series valve has the same form as the CCD type ultra-high vacuum plug valve, except that the connecting flange has been changed from a knife edge metal sealing structure to a nitrile rubber ring sealing structure according to the high vacuum flange; The material of the valve body and valve plate can be stainless steel or nickel plated carbon steel, and the sealing material of the valve plate is nitrile rubber. The applicable range is 1.3 × 104~105Pa.

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